Silicon-Glass Barometric Pressure Sensors
2778 of 3588

Silicon-Glass Barometric Pressure Sensors

June 14, 2010
Silicon-Glass Barometric Pressure Sensors The wafer-scale integration of silicon-glass capacitive barometric pressure sensors is shown along with an inset showing one device as viewed through its glass cap. Each vacuum-sealed reference cavity contains a closed-loop reference pressure control system. A microresonator is used to detect any residual pressure rise, allowing activation of in-cavity getters to maintain an overall sensor accuracy of 25mTorr. This work was supported by DARPA under contract number F30602-98-20227 and made use of Engineering Research Center for Wireless Integrated MicroSystems (at the University of Michigan) shared facilities supported by NSF under award EEC 00-96866. To read more about NSF's work with sensors, see the Sensor Revolution Special Report, "Sensor Applications: Industry & Commerce". [One of two related images. See Next Image.] (Date of Image: 2002)

comments powered by Disqus