Air Products and Showa Denko Extend Relationship
New C4F6 Plant to be Built in
CF4 and C2F6 remain reliable and cost competitive etch and chamber cleaning gases. Additionally, as logic and memory device manufacturing transitions to smaller geometries, higher aspect ratio dielectric etching will utilize more C4F6 because of the unique performance properties it exhibits within state-of-the-art high-density plasma etching processes. C4F6 typically provides higher selectivity and better etch profiles compared to other dielectric etch gases.
“Air Products is pleased to extend our relationship with Showa Denko for these important cleaning and etch gases,” said Corning Painter, vice president and general manager of Electronics for Air Products. “In addition, Showa Denko Air Products recognizes the increased importance of materials like C4F6 for critical dimension etch and is excited to be building capacity to meet that demand. This investment, along with our existing patented purification and transfill investments, will help Air Products increase our security of supply and meet anticipated increases in end customer demand.”
“I am very pleased with the opportunity to develop this new business using the foundation of our amicable relationship with APD which began more than 10 years ago,” said
Showa Denko Air Products (SDAP) was formed in 1996 to capitalize on Air Products’ fluorine handling capabilities and Showa Denko’s technical and operating expertise in large-scale perfluorocarbon production facilities. In 1997, SDAP built a production facility for CF4 and C2F6 in
Air Products (NYSE: APD) serves customers in industrial, energy, technology and healthcare markets worldwide with a unique portfolio of atmospheric gases, process and specialty gases, performance materials, and equipment and services. Founded in 1940, Air Products has built leading positions in key growth markets such as semiconductor materials, refinery hydrogen, home healthcare services, natural gas liquefaction, and advanced coatings and adhesives. The company is recognized for its innovative culture, operational excellence and commitment to safety and the environment. Air Products has annual revenues of over
***NOTE: This release may contain forward-looking statements. Actual results could vary materially, due to changes in current expectations.
SOURCE Air Products