Celerity Introduces Next Generation GF100 Series Mass Flow Controllers for Semiconductor Device and Solar Cell Manufacturing

January 19, 2009

SAN JOSE, Calif., Jan. 19 /PRNewswire/ — Celerity, Inc., a technology
leader in precision instruments and advanced gas and liquid delivery solutions
for the global semiconductor, solar and electronics industries, announced
today the introduction of its new GF100 series mass flow controller (MFC)
designed to precisely measure, monitor and control ultra high purity process
gas chemistry in semiconductor device and solar cell manufacturing processes.
The new Celerity GF100 series MFC is a highly configurable platform featuring
Celerity’s second generation proprietary pressure transient insensitive flow
technology, which improves process control, reduces cost of ownership, and
eliminates complexity of inventory management.

The new Celerity GF100 series mass flow controller product family features
a number of key benefits including high accuracy, reproducible gas
measurement, control from advanced digital architecture, in situ electronic
reconfiguration of gas and flow range for maximum process flexibility and
optimization, pressure transient insensitive flow technology design (enables
significant cost and size reduction of high purity gas delivery systems), and
intelligent embedded diagnostics, service port and software for simple and
efficient on-tool maintenance.

“Celerity is a market leader in advanced digital ultra high purity mass
flow controllers and an industry pioneer in pressure transient insensitive
MFCs. By leveraging our extensive experience in gas flow control, the GF100
series is a continuous improvement update (CIP) of our market leading
precision mass flow controllers, providing customers with a seamless RoHS
compliant upgrade for enhanced process control and lower cost of ownership,”
said David Somo, Celerity’s Senior Vice President of Sales and Marketing.

About Celerity

Celerity is a technology leader in the design, engineering, and
manufacturing of precision instruments and advanced gas and liquid delivery
solutions that are integral to the equipment used in manufacturing
semiconductors, flat panel displays, solar panels and related products.
Celerity, headquartered in San Jose, California, has approximately 800
employees worldwide, and is a privately held company with a majority ownership
by Texas Pacific Group. For additional information, please visit

SOURCE Celerity, Inc.

Source: newswire

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