Thin Film Deposition: Trends, Key Issues, Market Analysis
DUBLIN, April 11, 2014 /PRNewswire/ –
Research and Markets (http://www.researchandmarkets.com/research/6njz3z/thin_film)
has announced the addition of the “Thin Film Deposition: Trends, Key Issues, Market
Analysis.” [http://www.researchandmarkets.com/research/6njz3z/thin_film ] report to their
Thin film deposition processes play a critical role in the production of high-density,
high-performance microelectronic products. Considerable progress has been achieved in the
development of deposition processes — and in the development of the reactor systems
[http://www.researchandmarkets.com/research/6njz3z/thin_film ] in which they are carried
This report discusses the technology trends, products, applications, and suppliers of
materials and equipment.
It also gives insights to suppliers for future user needs and should assist them in
long range planning, new product development and product improvement.
This report compares some of the issues impacting users of different deposition tools,
including: APCVD (SACVD), LPCVD, PECVD, HDPCVD, ALCVD, PVD, ALD.
Key Topics Covered: Chapter 1: Introduction Chapter 2: Executive Summary Chapter 3: Physical Vapor Deposition 3.1 Introduction 3.2 Sputtering Technology 3.3 Plasma Technology 3.4 Reactor Designs 3.5 Semiconductor Processing 3.6 Targets Chapter 4: Chemical Vapor Deposition 4.1 Introduction 4.2 Chemical Vapor Deposition (CVD) Techniques Chapter 5: Electrochemical Deposition 5.1 Introduction 5.2 Reactor Design 5.3 Challenges 5.4 Additives 5.5 Processing 5.6 Copper Cathodes Chapter 6: Film Deposition And Film Properties 6.1 Introduction 6.2 Dielectric Deposition 6.3 Metal Deposition Chapter 7: Vendor Issues 7.1 Introduction 7.2 300mm Processing 7.3 Integrated Processing 7.4 Copper 7.5 Metrology 7.6 ESD 7.7 Parametric Test Chapter 8: Market Forecast 8.1 Introduction 8.2 Key Issues 8.3 Market Forecast Assumptions 8.4 Market Forecast 8.4.1 Chemical Vapor Deposition 8.4.2 Physical Vapor Deposition 8.4.3 Copper Electroplating Market 8.4.4 Atomic Layer Deposition Market
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