SPTS Technologies Expands Customer Portfolio With Multi-system Order From DigitalOptics Corporation
NEWPORT, Wales, January 16, 2013 /PRNewswire/ –
SPTS Technologies, a leading supplier of advanced wafer processing solutions for the
global semiconductor industry and related markets, today announced the receipt of a
multi-system order from DigitalOptics Corporation (DOC), a wholly-owned subsidiary of
Tessera, for Pegasus Rapier deep silicon etch and Primaxx HF Vapor release systems. These
systems will be used to manufacture MEMS-based autofocus actuators for smart phone
cameras.
(Logo:
http://photos.prnewswire.com/prnh/20130116/588621 )
Increasingly seen in high-end smart phones, DOC’s MEMS actuators are used to
automatically position lens elements within cameras to provide fast, precise, and low
power autofocus on the photo’s subject. Micromachined from silicon, successful production
of these devices relies on the critical performance of the silicon etch module followed by
the stiction-free HF vapor release of the micro-machined components. Powered by a patented
dual source configuration to produce uniform plasma density across the wafer, the Pegasus
Rapier DRIE module creates high aspect-ratio features with exceptional profile uniformity
and low tilt – key contributors to better device yields translating into cost savings per
die. The patented Primaxx(R) HF vapor technology utilizes a “dry” etch environment
ensuring stiction free release of the lens elements.
“Producing high-performance MEMS autofocus devices requires robust, repeatable and
precise manufacturing,” said Tony Tang, PhD., GM DigitalOptics MEMS. “The Pegasus Rapier
met our demanding profile uniformity and tilt goals at cost effective throughputs. These
attributes are of critical importance as we commercialize our camera modules. In addition,
as an existing user of the Primaxx(R) HF vapor system, we know it delivers the zero
stiction, high yield performance we need.”
“SPTS continues to expand the use of our systems in major MEMS market applications,
with smart phone imaging devices as one key growth area,” said Kevin T. Crofton, executive
vice president and chief operating officer of SPTS. “This order confirms SPTS’s technology
leadership across all areas of MEMS manufacturing.”
About SPTS Technologies
SPTS Technologies (a Bridgepoint portfolio company) designs, manufactures, sells, and
supports etch, PVD, CVD and thermal wafer processing solutions for the MEMS, advanced
packaging, LEDs, high speed RF on GaAs, and power management device markets. With
manufacturing facilities in Newport, Wales, Allentown, Pennsylvania, and San Jose,
California, the company operates across 19 countries in Europe, North America and
Asia-Pacific. For more information about SPTS Technologies, please visit
http://www.spts.com
About DigitalOptics Corporation
DigitalOptics Corporation, a wholly owned subsidiary of Tessera Technologies, Inc.
(NASDAQ: TSRA), delivers innovation in imaging and optics with products and capabilities
that enable expanded functionality in increasingly smaller devices. DigitalOptics
Corporation’s miniaturized camera module solutions provide cost-effective, high-quality
camera features, including extended depth of field (EDoF), zoom, image enhancement,
optical image stabilization and MEMS-based autofocus. These technologies can be applied to
consumer electronic products as well as vertical markets such as, automotive, medical and
security. The group also offers customized micro-optic lenses from diffractive and
refractive optical elements to integrated micro-optical subassemblies. DigitalOptics
Corporation is headquartered in San Jose, California. For information call 1-408-321-6000
or go to http://www.doc.com
[http://cts.businesswire.com/ct/CT?id=smartlink&url=http://www.doc.com&esheet=50327230&lan=en-US&anchor=www.doc.com&index=2&md5=5a008ef0883272dc1f1a85b0a97e88b7 ]
.
Photo:
http://photos.prnewswire.com/prnh/20130116/588621
SOURCE SPTS Technologies Ltd
