SPTS Ships 1000th DRIE Process Module
Milestone shipment extends company’s leadership in DRIE
SPTS Technologies, a supplier of advanced wafer processing solutions for the global semiconductor industry and related markets, today announced the company had reached a milestone in shipping its 1000(th) deep reactive ion etch (DRIE) module. This announcement was made at the SEMICON Singapore MEMS Forum in recognition of the country’s growing status as a hub of MEMS activity.
Fundamental to DRIE is the switched Bosch process patented by
“This 1000(th) shipment is a proud moment for everyone at SPTS,” said Dr.
NOTE: SPTS Technologies is presenting at the upcoming SEMICON Singapore 2013 event; 8(th) May at the 2.5D/3D IC Forum in panel discussion, and the MEMS Forum on 9(th) May at
About SPTS Technologies
SPTS Technologies (a Bridgepoint portfolio company) designs, manufactures, sells, and supports etch, PVD, CVD and thermal wafer processing solutions for the MEMS, advanced packaging, LEDs, high speed RF on GaAs, and power management device markets. With manufacturing facilities in
SOURCE SPTS Technologies Ltd