Leading Foundry in Asia has Adopted Jordan Valley’s New JVSensus(TM) Non-visual Crystalline Defect Detection Platform for Sub 20nm Node Process Control
MIGDAL HAEMEK, Israel, July 2, 2013 /PRNewswire/ –
Jordan Valley [http://www.jvsemi.com ], a leading supplier of X-ray based in-line
metrology and defect detection systems for advanced semiconductor manufacturing lines,
announced today that it shipped a JVSensus(TM) system to a leading Asian semiconductor
foundry manufacturer, who have adopted the tool as part of its process.
The JVSensus(TM) system provides non destructive, in-line tool for detection of non
visual, crystalline defects (NVD) on patterned or blanket wafers. These defects, such as
micro-cracks, slip lines and point defects, may cause a wafer breakage or device failure
during rapid thermal processes such as fast laser annealing, or during wafer handling. For
more detailed imaging of the defects, JVSensus supports dual resolution and enables non
destructive wafer cross-section imaging.
Isaac Mazor, Jordan Valley’s CEO, said: “We are pleased to have been selected by the
leading semiconductor foundry to support their advanced manufacturing yield by detecting
and classifying those process-induced defects that may lead to catastrophic wafer
“This selection represents the customer’s confidence in Jordan Valley’s ability to
provide a valuable defect detection solution for their demanding applications, trusting
the fully automated innovative X-ray imaging system to provide valuable means for yield
improvement and good ROI,” added Mr. Mazor.
Dr. Paul Ryan, Jordan Valley’s UK subsidiary manager, said: “Advanced technology
nodes, particularly 20nm nodes and below, set new yield challenges, partly due to new 3D
FinFET structures combined with aggressive thermal processes. These aggressive laser
annealing processes increase the importance of any mechanical backside or edge damage,
resulting in cracks and an increased likelihood of wafer breakage inside the process
“This selection for the JVSensus is evidence that our strategy of turning X-Ray
imaging into production worthy defect detection tool, successfully delivers the right
product for the benefit of our customers,” added Dr. Ryan.
About the JVSensus(TM) semiconductors production metrology tool
The JVSensus is a fully automated X-ray transmission topography system; enable in-line
detection of non visual crystalline defects on patterned or blanket 300mm or 450mm wafers.
The system is based on over 15 years of experience in the area of X-ray topography and was
designed for fully fab automation and automatic defect detection and classification. The
system is based on the 2012 “Best of West” award winner QCTT tool.
About Jordan Valley Semiconductors Ltd. http://www.jvsemi.com
Jordan Valley Semiconductors (JVS), the leader in X-ray metrology solutions for the
semiconductor industry, develops, manufactures and sells fully automated metrology tools
for advanced technology nodes based on non-contacting and non-destructive tools.
The company offers the semiconductor industry the most comprehensive portfolio of
advanced metrology tools, based on X-ray technologies such as XRR (X-ray reflectomerty),
XRF (X-ray fluorescence), HRXRD (X-ray diffraction) and XRDI (Imaging X-ray diffraction)
Jordan Valley’s investors include Clal Industries and Investments Ltd. (TASE: CII),
Intel Capital (NASDAQ: INTC) and Elron Electronics Industries Ltd. (TASE: ELRN). With
headquarters in Migdal Haemek Israel, the company has subsidiaries in Durham UK, Austin
Tx, USA, Hsin-Chu Taiwan, Suwon Korea as well as offices and representatives worldwide.
For more information: Alon Kapel, Director of Sales & Marketing Jordan Valley Semiconductors Ltd. Tel: +972-4-654-3666 x 134 firstname.lastname@example.org
SOURCE Jordan Valley Semiconductors Ltd.