Nova’s Metrology Solution Selected for 45nm Copper

March 30, 2009

REHOVOT, Israel, March 30 /PRNewswire-FirstCall/ — Nova Measuring
Instruments Ltd. (NASDAQ: NVMI) provider of leading edge stand-alone
metrology and the market leader of integrated metrology solutions to the
semiconductor process control market, received a multiple tool order for its
integrated NovaScan metrology solution for measurement of Copper line
thickness by a leading foundry. The integrated systems will complement the
already deployed standalone NovaScan systems as part of that foundry’s Copper
CMP process control scheme. The correlation of Copper line thickness
measurements by NovaScan metrology to electrical tests provides critical
information at an early stage of the device manufacturing process. The
combination of integrated and standalone metrology provides the manufacturing
fab the flexibility to visualize the Copper process on a wafer-to-wafer high
sampling basis or on lower sampling basis depending on specific process

The resistivity of metal interconnect lines directly affects the
performance and power consumption of the device. As semiconductor devices
shrink, lower resistivity Copper replaces the higher resistivity Aluminum as
the interconnect metal. As Copper process control is more challenging than
Aluminum, there is a need for metrology to measure accurately the profile of
the Copper line that ultimately determines the line’s resistivity.
Scatterometry has a unique capability to provide fast, accurate non contact
measurements of Copper line thickness and to detect Copper residues that can
degrade device performance and lower yield.

“As our customers continue to develop their advanced processes we are
committed to continue cooperating with them to provide the metrology
solutions they need”, said Noam Shintel, Corporate Marketing Director for
Nova. “For technology nodes of 45nm and below we see a move from Copper
process monitoring on solid measurement pads to a comprehensive control
scheme where the Copper line trench is measured after Etch and the Copper
line thickness is measured on 2D and 3D test targets after CMP. The
deployment of NovaScan is indicative that our adaptive solution of fully
matched high throughput standalone and integrated metrology coupled with
NovaMARS 3D modeling software enables control of Copper processes in advanced
technology nodes. With Advanced Process Control (APC) and Nova’s metrology
solutions, semiconductor manufacturers are able to significantly reduce their
process development cycle, increase the device performance and overall yield.”

About Nova: Nova Measuring Instruments Ltd. develops, produces and
markets advanced integrated and stand-alone metrology solutions for the
semiconductor manufacturing industry. Nova is traded on the NASDAQ & TASE
under the symbol NVMI. The Company’s website is http://www.nova.co.il.

This press release contains forward-looking statements within the meaning
of safe harbor provisions of the Private Securities Litigation Reform Act of
1995 relating to future events or our future performance, such as statements
regarding trends, demand for our products, expected deliveries, transaction,
expected revenues, operating results, earnings and profitability.
Forward-looking statements involve known and unknown risks, uncertainties and
other factors that may cause our actual results, levels of activity,
performance or achievements to be materially different from any future
results, levels of activity, performance or achievements expressed or implied
in those forward-looking statements. These risks and other factors include
but are not limited to: unanticipated consequences of the global economic
crisis, our dependency on a single integrated process control product line;
the highly cyclical nature of the markets we target; our inability to reduce
spending during a slowdown in the semiconductor industry; our ability to
respond effectively on a timely basis to rapid technological changes; risks
associated with our dependence on a single manufacturing facility; our
ability to expand our manufacturing capacity or marketing efforts to support
our future growth; our dependency on a small number of large customers and
small number of suppliers; risks related to our intellectual property;
changes in customer demands for our products; new product offerings from our
competitors; changes in or an inability to execute our business strategy;
unanticipated manufacturing or supply problems; changes in tax requirements;
changes in customer demand for our products; risks related to currency
fluctuations; and risks related to our operations in Israel. We cannot
guarantee future results, levels of activity, performance or achievements.
The matters discussed in this press release also involve risks and
uncertainties summarized under the heading “Risk Factors” in Nova’s Annual
Report on Form 20-F for the year ended December 31, 2007 filed with the
Securities and Exchange Commission on March 28, 2008, as amended. These
factors are updated from time to time through the filing of reports and
registration statements with the Securities and Exchange Commission. Nova
Measuring Instruments Ltd. does not assume any obligation to update the
forward-looking information contained in this press release.

    Company Contact:
    Dror David, Chief Financial Officer
    Nova Measuring Instruments Ltd.
    Tel: +972-8-938-7505
    E-mail: info@nova.co.il

    Website: http://www.nova.co.il

    Investor Relations Contacts:
    Ehud Helft / Kenny Green
    GK Investor Relations
    Tel: +1-646-201-9246
    Email: info@gkir.com

SOURCE Nova Measuring Instruments Ltd

Source: newswire

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