Samsung Selects Jordan Valley’s JVX6200 for On-Line Thin Films Metrology
“Our evaluation demonstrated that the JVX6200 XRR with the JVXRR analysis software deliver superb results and outstanding throughput,” noted Dr.
Samsung’s selection of the JVX6200 further enhances our position as the market leader in X-ray based metrology for the sub-50 nm processes noted Mr.
About the JVX6200 X-ray metrology tool
Jordan Valley’s JVX6200 X-ray metrology tool is a multi channel, high throughput and small footprint, fully fab-automated metrology tool, specifically built for most advanced production fabs. The JVX6200 is utilized for advanced process control at the front end of line (FEOL) and back-end of line (BEOL) applications in fabs worldwide. The JVX6200 X-Ray Reflectometry (XRR) is a non-contact, non-distractive, surface-sensitive technique that delivers precise and accurate characterization of thin films and multi-layer stacks. The XRR technique measures thickness, density and roughness data by analyzing the reflection vs. angle, and interference patterns of X-rays that reflect off the interfaces. The JVX6200 XRR analyzes single and multiple thin films metal and dielectric layers from 1 to 500 nm thick.
About Jordan Valley
Jordan Valley Semiconductors Ltd. is a worldwide leader in the development, manufacture and selling thin films metrology tools for most advanced semiconductor manufacturing processes. We offer a comprehensive family of solutions based on advanced X-Ray Reflectivity (XRR), X-Ray Fluorescence (XRF) and High Resolution X-Ray Diffractometry (HRXRD). These tools are fully automated, production ready and ideal for both blanket and patterned wafers. Jordan Valley’s X-Ray technology enables accurate and precise characterization of all film types – including single and multi-layer stacks, high k and low k materials, metals and dielectrics, amorphous, poly-crystal, and single crystal films. Research and Development, Sales & Headquarters are based in Migdal Ha’Emek,
For additional information about
SOURCE Jordan Valley Semiconductors