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Samsung Selects Jordan Valley’s JVX6200 for On-Line Thin Films Metrology

May 11, 2009

MIGDAL HA’EMEK, Israel, May 11 /PRNewswire/ — Jordan Valley Semiconductors Ltd. announced that Korea-based Samsung Electronics Co. Ltd, has selected the JVX6200 advanced thin films, in-line metrology system for their next generation applications in the FEOL and BEOL areas. Jordan Valley’s JVX6200 XRR & XRF tool demonstrated great flexibility and ease of use.

“Our evaluation demonstrated that the JVX6200 XRR with the JVXRR analysis software deliver superb results and outstanding throughput,” noted Dr. B.H Lee, Sr. Manager of Metrology division. at Samsung Electronics Co. Ltd. Dr. Lee continued: “With the JVX6200, we are able to tighten our process control even for the most demanding thin films, while enhancing throughput and flexibility. The JVX6200 improves our productivity and yields.”

Samsung’s selection of the JVX6200 further enhances our position as the market leader in X-ray based metrology for the sub-50 nm processes noted Mr. Isaac Mazor, President and CEO of Jordan Valley Semiconductors. This is another vote of confidence for our innovative products, designed for the demanding metrology needs with high throughput, small footprint and low COO, further mentioned Mr. Mazor. “We look forward to continual support of Samsung’s metrology needs as they evolve.”

About the JVX6200 X-ray metrology tool

Jordan Valley’s JVX6200 X-ray metrology tool is a multi channel, high throughput and small footprint, fully fab-automated metrology tool, specifically built for most advanced production fabs. The JVX6200 is utilized for advanced process control at the front end of line (FEOL) and back-end of line (BEOL) applications in fabs worldwide. The JVX6200 X-Ray Reflectometry (XRR) is a non-contact, non-distractive, surface-sensitive technique that delivers precise and accurate characterization of thin films and multi-layer stacks. The XRR technique measures thickness, density and roughness data by analyzing the reflection vs. angle, and interference patterns of X-rays that reflect off the interfaces. The JVX6200 XRR analyzes single and multiple thin films metal and dielectric layers from 1 to 500 nm thick. Jordan Valley’s advanced XRR technology allows measurements on production wafers and offers superior throughput of over 30 WPH (17 points on 300mm wafer).

About Jordan Valley

Jordan Valley Semiconductors Ltd. is a worldwide leader in the development, manufacture and selling thin films metrology tools for most advanced semiconductor manufacturing processes. We offer a comprehensive family of solutions based on advanced X-Ray Reflectivity (XRR), X-Ray Fluorescence (XRF) and High Resolution X-Ray Diffractometry (HRXRD). These tools are fully automated, production ready and ideal for both blanket and patterned wafers. Jordan Valley’s X-Ray technology enables accurate and precise characterization of all film types – including single and multi-layer stacks, high k and low k materials, metals and dielectrics, amorphous, poly-crystal, and single crystal films. Research and Development, Sales & Headquarters are based in Migdal Ha’Emek, Israel. Primary manufacturing is based in Migdal Ha’Emek with a secondary location in Durham, United Kingdom. Demo lab, Sales & Customer support office is in Austin, Texas, USA. Jordan Valley products are used in production by leading semiconductor manufacturers worldwide. Jordan Valley’s primary shareholders are Clal Industries and Investments Ltd., Intel Capital, and Elron Electronic Industries Ltd.

For additional information about Jordan Valley, please visit our web site at: http://www.jvsemi.com

SOURCE Jordan Valley Semiconductors


Source: newswire



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