STS Wins DRIE Tender at Fraunhofer ISIT

June 11, 2009

Pegasus provides silicon etch capability for production and process development

NEWPORT, Wales, June 11 /PRNewswire/ – Surface Technology Systems plc (STS), a leader in plasma process technologies for manufacturing MEMS and advanced semiconductor devices, today announced that they have received an order from Fraunhofer Institute for Silicon Technology ISIT for its market leading Pegasus system. This 200mm system will be used in a variety of projects within the research and development center for Microelectronics and Microsystems Technology which ISIT represents, providing research and production in one location.

Fraunhofer ISIT, based in Itzehoe, Germany develops and manufactures components in microelectronics and microsystems technology, from the design phase — including system simulation — to prototyping and fabrication of samples, up to series production for a wide range of applications such as medical care, environmental and traffic engineering, communication systems, automotive industry, and mechanical engineering. Working under contract, ISIT develops devices in accordance with customer requirements including full system integration using miniaturized assembly and interconnection technology. Together with Vishay Siliconix Itzehoe GmbH, the institute operates a professional semiconductor production line which is up-to-date in all required quality certifications (e.g. ISO 9001, TS 16949). This line is used in parallel for PowerMOS and microsystem production and for R&D projects developing new devices and technological processes.

“We deal with a large variety of customers, creating a high demand for our deep silicon etch technology,” said Christian Schroeder of Fraunhofer ISIT. “The Pegasus system from STS is by far the most flexible tool to satisfy these varied and highly challenging specifications. In addition to process flexibility, we also require high etch rates with good uniformity and profile control for typical MEMS structures, and very fine CD control and smooth sidewalls for semiconductor and TSV applications. We are convinced that the Pegasus system delivers the best process capability available on the market place today.”

Eizo Yasui, CEO of STS replied, “Winning this order at a leading European facility, with exposure to a large number of users, is important for us. We are confident our Pegasus provides the ideal combination of flexibility and market-leading process capabilities on a production-proven system, to enable Fraunhofer ISIT and their clients to transfer their own innovations into new business successes.”

About Surface Technology Systems plc

STS, a wholly-owned subsidiary of Sumitomo Precision Products Co., Ltd designs and manufactures a range of highly specialized systems incorporating innovative technology used in the production of semiconductors and related devices and is a leader in plasma based etch and deposition technologies for processing non ‘mainstream’ semiconductor devices. STS serves a range of applications in several sectors within the telecommunications, data storage, advanced packaging, MEMS and Nanotechnology.

STS is the market leader in deep silicon etching for the growing advanced packaging and MEMS market, where it offers patent-protected technology. In addition, STS has a strong presence in each of its other served markets and distributes its process solutions worldwide through an experienced sales and service operation. The Group currently markets in over 30 countries and has an installed base of over 900 systems.

For more information about STS please see http://www.stsystems.com

About Sumitomo Precision Products Co., Ltd

Sumitomo Precision Products Co., Ltd, headquartered in Amagasaki (Japan), have, over the past 90 years, expanded from their core field of aerospace products into such diverse areas as heat-exchangers and heat-control systems, industrial machinery employing hydraulic control, equipment for semiconductor and flat panel display production, ozone generators for protecting the environment and their unique motion sensors.

For more information about SPP, please see http://www.spp.co.jp

SOURCE Surface Technology Systems plc

Source: newswire

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