STS Wins DRIE Tender at Fraunhofer ISIT
Pegasus provides silicon etch capability for production and process development
Fraunhofer ISIT, based in Itzehoe,
“We deal with a large variety of customers, creating a high demand for our deep silicon etch technology,” said
About Surface Technology Systems plc
STS, a wholly-owned subsidiary of Sumitomo Precision Products Co., Ltd designs and manufactures a range of highly specialized systems incorporating innovative technology used in the production of semiconductors and related devices and is a leader in plasma based etch and deposition technologies for processing non ‘mainstream’ semiconductor devices. STS serves a range of applications in several sectors within the telecommunications, data storage, advanced packaging, MEMS and Nanotechnology.
STS is the market leader in deep silicon etching for the growing advanced packaging and MEMS market, where it offers patent-protected technology. In addition, STS has a strong presence in each of its other served markets and distributes its process solutions worldwide through an experienced sales and service operation. The Group currently markets in over 30 countries and has an installed base of over 900 systems.
For more information about STS please see http://www.stsystems.com
About Sumitomo Precision Products Co., Ltd
Sumitomo Precision Products Co., Ltd, headquartered in Amagasaki (
For more information about SPP, please see http://www.spp.co.jp
SOURCE Surface Technology Systems plc