Mykrolis Introduces IntelliFlow(R) 3XP Digital Mass Flow Controller at SEMICON West
Posted on: Wednesday, 7 July 2004, 06:00 CDT
SAN FRANCISCO, SEMICON West, July 7 /PRNewswire-FirstCall/ -- Mykrolis Corporation , a leading supplier of components and subsystems to the semiconductor industry, will introduce its new IntelliFlow(R) 3XP Digital Mass Flow Controller (MFC) at SEMICON West (Booth #726) in San Francisco from July 12-14, 2004. IntelliFlow 3XP is Mykrolis's 3rd generation of IntelliFlow Digital MFCs and uniquely integrates several Mykrolis gas delivery core technologies into a single, modular solution for advanced semiconductor processing.
IntelliFlow 3XP delivers extreme performance for key attributes such as accuracy, response time, control range, pressure insensitivity, and programmability to enable superior yield on next generation etch, deposition and thermal processes. IntelliFlow 3XP also offers a unique, modular solution by providing options for integrated pressure transducers, displays, and UHP contamination control which can lower gas system cost and size while simultaneously improving quality, simplifying maintenance, and increasing tool uptime. IntelliFlow 3XP will continue to incorporate industry leading IntelliFlow software for user configurable gases and ranges, diagnostics, and graphical user interfaces.
According to Bill Culwell, product manager at Mykrolis Corp., "IntelliFlow 3XP offers the latest in state of the art technology available for gas flow control. Its unique combination of extreme performance, integrated technology, and superior user configurable and diagnostic software provides customers the ultimate capability for improving IC processing, tool uptime, and cost of ownership.
About Mykrolis
Mykrolis Corporation, based in Billerica, Massachusetts, is a worldwide developer, manufacturer and supplier of liquid and gas delivery systems, components and consumables used to precisely measure, deliver, control and purify the process liquids, gases and chemicals, as well as the deionized water, photoresists and vacuum systems utilized in the semiconductor manufacturing process. In addition, the Company's products are used to manufacture a range of other products, such as flat panel displays, high purity chemicals, photoresists, solar cells, gas lasers, optical disks and fiber optic cables. Mykrolis acquired the assets of Aeronex Corporation in October 2003. Mykrolis is formerly Millipore Microelectronics, Inc. For more information, visit http://www.mykrolis.com/.
IntelliFlow and Mykrolis are registered trademarks of Mykrolis Corporation.
Press Contact:
Craig B. Lazinsky
Mykrolis Corporation
Tel. +01 978-436-6743
Craig_lazinsky@mykrolis.com
Mykrolis Corporation
CONTACT: Craig B. Lazinsky, Mykrolis Corporation, +01 978-436-6743,Craig_lazinsky@mykrolis.com
Web site: http://www.mykrolis.com/
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