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Latest Deep reactive-ion etching Stories

2011-06-21 08:00:00

ST. FLORIAN, Austria, June 21, 2011 /PRNewswire/ -- EV Group (EVG), a leading supplier of wafer bonding and lithography equipment for the MEMS, nanotechnology and semiconductor markets, today announced it has introduced a new in-line metrology module for its EVG850TB automated temporary bonding and debonding systems. This new metrology capability, which is now available as an option on the EVG850TB and EVG850DB platforms, allows customers to implement in-line process control for...

2010-03-10 09:32:00

SHANGHAI, and SAN FRANCISCO, March 10 /PRNewswire-Asia/ -- Advanced Micro-Fabrication Equipment, Inc. (http://www.amec-inc.com/ ) (AMEC) today announced that it has closed its Series D financing round by securing $46 million from existing investors. They include: Shanghai Venture Capital Co. Ltd. (http://www.shvc.com.cn/ ), Walden International (http://www.waldenintl.com/ ), Lightspeed Venture Partners (http://www.lightspeedvp.com/ ), Goldman Sachs (http://www.goldmansachs.com/ ),...

2009-12-03 17:01:00

NEWPORT, Wales, Dec. 3 /PRNewswire/ -- SPP Process Technology Systems (SPTS) and its parent company Sumitomo Precision Products Co., Ltd (SPP), leaders in plasma process technologies for manufacturing micro-electro mechanical systems (MEMS) and advanced semiconductor devices, today announced that they have sold their 300mm-compatible DRIE production tool to CEA-LETI in France. Named the "Pegasus300", this latest tool is a natural evolution of the well-established 200mm "Pegasus" system,...

2009-09-01 09:00:00

NEWPORT, Wales, Sept. 1 /PRNewswire/ -- Surface Technology Systems plc (STS), a leader in plasma process technologies for manufacturing micro electromechanical systems (MEMS) and advanced semiconductor devices, today announced that they have sold a Pegasus DRIE system to Integrated Sensing Systems (www.mems-issys.com). ISSYS was established in 1995 to design, develop, manufacture and commercialize innovative products based on high performance MEMS. Nader Najafi, founder of ISSYS stated,...

2009-07-09 12:40:00

ALBANY, N.Y. and ST. FLORIAN, Austria, July 9 /PRNewswire/ -- EV Group (EVG), a leading supplier of wafer bonding and lithography equipment for the MEMS, nanotechnology and semiconductor markets, today announced that SEMATECH, the global consortium of chipmakers, has selected EVG's fully automated 300-mm GEMINI(R) wafer bonder for enabling next-generation TSV and 3D interconnects. This order represents the industry's first fully automated 300-mm wafer bonder to integrate all four types of...

2009-07-07 09:00:00

NEWPORT, Wales, July 7 /PRNewswire/ -- Surface Technology Systems plc (STS), a leader in plasma process technologies for manufacturing MEMS and advanced semiconductor devices, today announced that they have sold a Pegasus DRIE system to the University of Michigan, Ann-Arbor (www.umich.edu). This will be installed alongside another Pegasus tool, purchased in 2008 and will be used for deep reactive ion etching (DRIE) of silicon for MEMS research. The University is very highly regarded as...

2009-06-11 07:13:00

Pegasus provides silicon etch capability for production and process development NEWPORT, Wales, June 11 /PRNewswire/ -- Surface Technology Systems plc (STS), a leader in plasma process technologies for manufacturing MEMS and advanced semiconductor devices, today announced that they have received an order from Fraunhofer Institute for Silicon Technology ISIT for its market leading Pegasus system. This 200mm system will be used in a variety of projects within the research and development...


Word of the Day
sough
  • A murmuring sound; a rushing or whistling sound, like that of the wind; a deep sigh.
  • A gentle breeze; a waft; a breath.
  • Any rumor that engages general attention.
  • A cant or whining mode of speaking, especially in preaching or praying; the chant or recitative characteristic of the old Presbyterians in Scotland.
  • To make a rushing, whistling, or sighing sound; emit a hollow murmur; murmur or sigh like the wind.
  • To breathe in or as in sleep.
  • To utter in a whining or monotonous tone.
According to the OED, from the 16th century, this word is 'almost exclusively Scots and northern dialect until adopted in general literary use in the 19th.'
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