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Latest EUV Litho Inc. Stories

2008-06-17 18:00:39

Increasingly powerful plasma source based scanners that could be enhanced with optical innovations and improved resists are driving extreme ultraviolet lithography (EUVL) closer to manufacturability, according to technologists at a recently concluded EUVL R&D forum here.


Word of the Day
coruscant
  • Emitting flashes of light; glittering.
The word 'coruscant' comes from a Latin word meaning 'to flash' or 'to sparkle'.
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