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Latest EUV Litho Inc. Stories

2008-06-17 18:00:39

Increasingly powerful plasma source based scanners that could be enhanced with optical innovations and improved resists are driving extreme ultraviolet lithography (EUVL) closer to manufacturability, according to technologists at a recently concluded EUVL R&D forum here.


Word of the Day
pawl
  • A pivoted catch designed to fall into a notch on a ratchet wheel so as to allow movement in only one direction (e.g. on a windlass or in a clock mechanism), or alternatively to move the wheel in one direction.
The word 'pawl' probably comes from a Latin word meaning 'stake'.
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