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Last updated on April 19, 2014 at 21:20 EDT

Latest metrology tool Stories

2013-07-03 23:01:32

Park Systems, world leader in atomic force microscopy (AFM) for the semiconductor and hard disk markets introduces Park NX-HDM, a fully automated automatic defect review and sub-angstrom surface roughness atomic force microscopy (AFM) system for device substrates and disk media, the first metrology tool capable of providing this level of accuracy and automation. The NX-HDM system sets a new standard for the industry in automatic defect review AFM technology by increasing throughput up to...