Latest Primo AD-RIE Stories

SHANGHAI and SAN FRANCISCO, March 19, 2012 /PRNewswire-Asia/ -- Today, at SEMICON China, the country's premier tradeshow for semiconductor equipment and materials, Advanced Micro-Fabrication Equipment Inc. (AMEC) announced that one of its second-generation dielectric etch tools, the Primo AD-RIE(TM) is now installed at leading Chinese foundry, SMIC. The customer will use the tool for process applications at nodes of 32/28nm and below. This is the first installation in China for the Primo...