Latest Tokyo Electron Limited Stories
MILPITAS, Calif., March 28, 2011 /PRNewswire/ -- Today KLA-Tencor Corporation(TM) (Nasdaq: KLAC) announced the SpectraShape(TM) 8660 and 8810 dimensional metrology systems, featuring AcuShape(TM)2 modeling software developed jointly with Tokyo Electron Limited (TEL).
Tokyo, Nov 24, 2010 - (JCN Newswire) - Tokyo Electron Limited and Tanaka Kikinzoku Kogyo K.K.(1) announce the successful development of a recycling process for ruthenium precursors (CVD-ruthenium material) used in next generation semiconductor miniaturization technology.Ruthenium precursors which are disposed of without being collected as valuable resources can now be collected, refined, and re-used without returning them to ruthenium metal.
SAN JOSE, Calif., Sept.
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